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Content

Specification

Model

H1

Treatment type

Thermal & wet

Capacity

600SLM

Applicable process

NH3 : 30SLM, H2 50SLM

SiH2Cl2 : 0.5SLM, SiH4 : 0.5SLM

PH3 : 0.5SLM, AsH3 :0.5SLM

Control type

PLC base touch screen

Dimension (W x D x H ,mm)

750 X 700 x 1731

AC power  full load

208~220V 1phase 8kw

Running  power

208~220 1phase 6kw

No

Gas

Processing type

Scrubber spec (%)

Gas Reaction

1

BCL3

Heat &wet

99

BCl3  +  3 FeO (OH???) ®B(OH)3  +  3 FeOCl

2

CL2

wet

99

2 Cl2  +  4 FeO (OH???) ®4 FeOCl  +  O2  +  2 H2O

3

HCL

Wet

98

3 HCl  + FeO (OH???) ®FeCl3  +  2 H2O

4

HBr

Heating

97

2HBr+1/2O2→H2O+Br2

5

NF3

Heating &wet

96

2NF3 → N2+3F2

8

CHF3

Heating &wet

95

CHF3+O2 → CO2+HF+F2

9

SiH4

Heating &wet

99

SiH4+2O2 → SiO2+2H2O

10

DCS

Heating &wet

98

SiH2Cl2+3/2O2 → SiO2+H2O+Cl2

11

B2H6

Heating &wet

99

B2H6+3O2 → B2O3+3H2O

12

PH3

Heating &wet

99,9

2PH3+4O2 → P2O5+3H2O

13

TEOS

Heating &wet

98

Si(CO2H5)4+12O2 → 8CO2+SiO2+10H2O

14

NH3

Heating &wet

99

4NH3+3O2 → 2N2+6H2O

15

WF6

Heating (H2 supply 20slm)

95

WF6+3/2O2 → WO3+3F2

16

N2O

Heating

98

N2O → N2+1/2O2

18

POCL3

Heating &wet

95

4POCL3 +3O2 ->  2P2O5 + 6 CL2

19

SiHCL3

Heating &wet

97

SiHlCL3+O2 → SiO2+3Cl3

20

SiH2CL2

Heating

97

SiH2CL2+O2 → SiO2+2Cl2

21

SiCL4

Heating &wet

97

SiCl4+O2 → SiO2+2Cl2

22

BF3

Heating &wet

97

2BF3+3/2O2 → B2O3+3F2

23

H2

Heating

99,99

H2+1/2O2 → H2O